Enhanced Raman spectroscopy analysis for contamination detection on microelectronic devices using gold nanoclusters grown by DC magnetron sputtering
نویسندگان
چکیده
Surface-enhanced Raman spectroscopy (SERS) is one of the most powerful analytical techniques for identification molecules in microelectronics industry failure analysis protocols. In this work, dry-processed gold nanoclusters were prepared by magnetron sputtering deposition to promote enhancement signal from selected common polymers found hard disk drive as surface contamination. The optimized conditions applied SERS on poly-carbonate (PC), polyethylene terephthalate (PET), polypropylene (PP), and high-density (HDPE). spectrum showed average intensity gain at about 114%, 78%, 254%, 226%, respectively. with nanoclusters, sputtering, demonstrates that method a clean, simple, highly performing can be an alternative over use colloidal nanoparticles contamination investigation industrial procedures, where sample cleanness during critical, microelectronic industry.
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ژورنال
عنوان ژورنال: Journal of metals, materials and minerals
سال: 2023
ISSN: ['0857-6149']
DOI: https://doi.org/10.55713/jmmm.v33i3.1665